RESONATOR ELEMENT, RESONATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOBILE BODY AND METHOD OF MANUFACTURING RESONATOR ELEMENT

摘要

A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.

主权项

1. A resonator element comprising:
a substrate; and an electrode that includes:
a first conductive layer on a surface of the substrate; anda second conductive layer on the first conductive layer opposite to the substrate,the second conductive layer including an excitation electrode region, and a pad electrode region,the pad electrode region being electrically connected to the excitation electrode region,the excitation electrode region of the second conductive layer being circumferentially recessed relative to an outer peripheral edge of the first conductive layer in a plan view, andthe first conductive layer being a first material and the second conductive layer being a second material, the second material being different from the first material.