发明名称 High numerical aperture objective lens system
摘要 An objective lens system having a high numerical aperture, a large working distance, and low optical aberrations over a wide spectral band of wavelengths is disclosed. The objective lens system includes a first lens group, a second lens group, and a third lens group. The first lens group includes first and second positive meniscus lenses that are positioned at a distance from each other along an optical axis of the objective lens system. The distance may be dependent on a focal length of the objective lens system. The second lens group includes first and second meniscus lenses and a bi-convex lens. The third lens group includes a bi-concave lens and a doublet lens.
申请公布号 US9513559(B2) 申请公布日期 2016.12.06
申请号 US201514819335 申请日期 2015.08.05
申请人 ASML Holding N.V. 发明人 Ryzhikov Lev
分类号 G03B27/54;G03F7/20;G02B13/14;G01N21/95;G01N21/88;G02B21/02 主分类号 G03B27/54
代理机构 Sterne, Kessler, Goldstein & Fox P.L.L.C. 代理人 Sterne, Kessler, Goldstein & Fox P.L.L.C.
主权项 1. An objective lens system comprising: a first lens group comprising: a first positive meniscus lens, anda second positive meniscus lens positioned at a distance from the first positive meniscus lens along an optical axis of the objective lens system, the distance being dependent on a focal length of the objective lens system; a second lens group comprising a triplet lens, wherein a triplet lens comprises: a first meniscus lens comprising a first surface and a second surface,a second meniscus lens comprising a third surface and a fourth surface, the third surface being in substantial contact with the second surface, anda first bi-convex lens comprising a fifth surface and a sixth surface, the fifth surface being in substantial contact with the fourth surface; and a third lens group comprising: a first bi-concave lens; anda doublet lens.
地址 Veldhoven NL