发明名称 |
High numerical aperture objective lens system |
摘要 |
An objective lens system having a high numerical aperture, a large working distance, and low optical aberrations over a wide spectral band of wavelengths is disclosed. The objective lens system includes a first lens group, a second lens group, and a third lens group. The first lens group includes first and second positive meniscus lenses that are positioned at a distance from each other along an optical axis of the objective lens system. The distance may be dependent on a focal length of the objective lens system. The second lens group includes first and second meniscus lenses and a bi-convex lens. The third lens group includes a bi-concave lens and a doublet lens. |
申请公布号 |
US9513559(B2) |
申请公布日期 |
2016.12.06 |
申请号 |
US201514819335 |
申请日期 |
2015.08.05 |
申请人 |
ASML Holding N.V. |
发明人 |
Ryzhikov Lev |
分类号 |
G03B27/54;G03F7/20;G02B13/14;G01N21/95;G01N21/88;G02B21/02 |
主分类号 |
G03B27/54 |
代理机构 |
Sterne, Kessler, Goldstein & Fox P.L.L.C. |
代理人 |
Sterne, Kessler, Goldstein & Fox P.L.L.C. |
主权项 |
1. An objective lens system comprising:
a first lens group comprising:
a first positive meniscus lens, anda second positive meniscus lens positioned at a distance from the first positive meniscus lens along an optical axis of the objective lens system, the distance being dependent on a focal length of the objective lens system; a second lens group comprising a triplet lens, wherein a triplet lens comprises:
a first meniscus lens comprising a first surface and a second surface,a second meniscus lens comprising a third surface and a fourth surface, the third surface being in substantial contact with the second surface, anda first bi-convex lens comprising a fifth surface and a sixth surface, the fifth surface being in substantial contact with the fourth surface; and a third lens group comprising:
a first bi-concave lens; anda doublet lens. |
地址 |
Veldhoven NL |