| 摘要 |
A first pressure chamber and a second pressure chamber are provided with means for continuously exerting a constant inward pressure on a first diaphragm part and a third diaphragm part respectively. A valve chamber having a flow control portion wherein a flow rate of the controlled fluid flowing from an inflow chamber to an outflow chamber is controlled by changing a size of the opening defined between a valve part and a valve seat, caused by a displacement of the valve part of a valve mechanism. A differential pressure chamber connects with the outflow chamber and has a bypass opening of a bypass passage connecting to the outflow passage.
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