Organic light-emitting diode (OLED) display panel, manufacturing method thereof and display device

摘要

An organic light-emitting diode (OLED) display panel, a manufacturing method thereof and a display device are provided. In the manufacturing method, pixel electrodes, required to be deposited with a material, on a base substrate are charged, and electrodes at an evaporation source are charged to form an electric field; evaporation material corresponding to the material required to be deposited are placed into the evaporation source and ionized, and the ionized evaporation material are deposited on the base substrate under the action of the electric field; deposited material in other pixel units are etched off and removed, so that the evaporation material only on the previously charged pixel electrodes on the base substrate are retained; and patterns of the required material are formed by the processes of deposition and etching in turn. The manufacturing method improves the resolution of finished products and can help to improve the resolution of the OLED.

主权项

1. A method for manufacturing an organic light-emitting diode (OLED) display panel, comprising:
placing a base substrate provided with pixel electrodes of pixel units into an evaporation chamber; electrically charging pixel electrodes of pixel units, required to be deposited with a material, on the base substrate, electrically charging electrodes disposed at an evaporation source in the evaporation chamber, and forming an electric field; placing an evaporation material corresponding to the material required to be deposited into the evaporation source, ionizing the evaporation material, and depositing the ionized evaporation material on the base substrate under the action of the electric field; and etching the base substrate provided with the ionized evaporation material by an etching process, and retaining the evaporation material only on the previously charged pixel electrodes on the base substrate.