| 摘要 |
PROBLEM TO BE SOLVED: To integrate both motors to achieve long average time before a first failure and high speed region coverage, and to reduce mechanical vibration during driving, by driving a stage for holding a machined object in the X-axis direction by an electromagnetic motor, and in the Y-axis direction by a non- electromagnetic motor with smaller duty cycle than this. SOLUTION: In this stage 100 for holding a machined object, high speed and low speed platforms 107, 109 are provided in this order on the upper surface of a fixed basement 113, and a rotational table 110 is provided on this. The platforms 107, 109 are respectively moved along the X-axis and the Y-axis by an electromagnetic motor 112a (112b) and a non-electromagnetic motor 103a (103b). A duty cycle of the electromagnetic motor during operation period of the stage 100 is larger than that of the non-electromagnetic motor, and both motors are applied to vacuum. Thus, they are adequate to a charged-particle microscope system, minimize interference to the charged-particle microscope and generation of micro particles, and can be downsized.
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