A MICRO-ELECTRO-MECHANICAL TWO DIMENSIONAL MIRROR WITH ARTICULATED SUSPENSION STRUCTURES FOR HIGHT FILL FACTOR ARRAYS,申请号EP20040821902-传众专利搜索

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发明名称	A MICRO-ELECTRO-MECHANICAL TWO DIMENSIONAL MIRROR WITH ARTICULATED SUSPENSION STRUCTURES FOR HIGHT FILL FACTOR ARRAYS
摘要
申请公布号	EP1738214(A1)	申请公布日期	2007.01.03
申请号	EP20040821902	申请日期	2004.11.19
申请人	METCONNEX CANADA INC.	发明人	MALA, MOHIUDDIN;DUCELLIER, THOMAS;HNATIW, ALAN;PEALE, DAVID
分类号	G02B26/08;B81B3/00;B81B7/02;G02B6/35	主分类号	G02B26/08
代理机构		代理人
主权项
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