| 摘要 |
A method and system for autofocusing of microscopes. The image of the object or of a structure which is reflected onto the object is passed to two detectors or to two regions of a detector, one image being produced in front of, and one image behind, the respective detector in the focusing position, and the image definitions on the detectors being converted into electronic signals whose difference is used for setting the definition of the object, the distances between the images of this object or of this structure and the respective detectors being adjustable. Selective offset adjustments and "IR offset" correction adjustments can be used.
|
