发明名称 ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS
摘要 <p>Electronic/electric components used in a clean room having a controlled atmosphere for treatment of substrates in the preparation of semiconductor devices, each comprising a resin substrate and an additive added to the resin substrate, the additive comprising an antistatic agent of a nonionic compound having a molecular weight of not less than 350, an antioxidant of a phenolic compound having a molecular weight of not less than 300, and at least one member selected from among lubricants, plasticizers, and water repellants, the additive being less likely to release a gaseous organic component from the resin substrate under service conditions. </p>
申请公布号 WO1998042783(P1) 申请公布日期 1998.10.01
申请号 JP1998001296 申请日期 1998.03.25
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