发明名称 HARD MATERIAL LAYER.
摘要 <p>The invention relates to a hard material layer, deposited on a workpiece (30) as a functional layer (32) by means of an arc-PVD method. Said layer is essentially embodied by an electrically insulating oxide of at least one of the metals (Me) of the transition metals of the sub-groups IV, V, VI of the periodic table and Al, Si, Fe, Co, Ni, Co, or Y and the functional layer (32) contains no noble gas or halogen.</p>
申请公布号 MX2007011703(A) 申请公布日期 2008.03.10
申请号 MX20070011703 申请日期 2006.01.19
申请人 OERLIKON TRADING AG, TRUBBACH 发明人 JURGEN RAMM;BENO WIDRIG;WOLFGANG KALSS
分类号 C23C14/32;C23C14/28;H01J37/32 主分类号 C23C14/32
代理机构 代理人
主权项
地址