LIQUID EJECTION APPARATUS AND METHOD OF FORMIMG LIQUID EJECTION APPARATUS

摘要

A liquid ejection apparatus and method of manufacture are disclosed. One apparatus includes a pressure chamber, a diaphragm covering the pressure chamber, and a piezoelectric element having a piezoelectric component positioned opposing the pressure chamber. The apparatus further includes a first electrode disposed on a first side of the piezoelectric component toward the pressure chamber and a second electrode disposed on a second side of the piezoelectric component opposite the first side in an opposed region, the opposed region being a region opposed to the second electrode. The apparatus also includes a metal film disposed between the piezoelectric component and the diaphragm, the metal film being absent from at least a portion of the opposed region. The metal film and the first electrode are in electrical contact with each other. The first electrode is made of platinum and the metal film is made of a metal material other than platinum.

主权项

1. A liquid ejection apparatus comprising:
a pressure chamber; a diaphragm covering the pressure chamber; a piezoelectric element having a piezoelectric component positioned opposing the pressure chamber; a first electrode disposed on a first side of the piezoelectric component toward the pressure chamber; a second electrode disposed on a second side of the piezoelectric component opposite the first side in an opposed region, the opposed region being a region opposed to the second electrode; and a metal film disposed between the piezoelectric component and the diaphragm, the metal film being absent from at least a portion of the opposed region; wherein the metal film and the first electrode are in electrical contact with each other; and, the first electrode is made of platinum and the metal film is made of a metal material other than platinum.