发明名称 Integrated circuit system with tunable resistor and method of manufacture thereof
摘要 An integrated circuit system, and a method of manufacture thereof, includes: an integrated circuit substrate; and a discretized tunable precision resistor having a total resistance including: a resistor body over the integrated circuit substrate, interconnects directly on the resistor body, metal taps directly on the interconnects and at opposing sides of the resistor body, and conductive metal strips over the interconnects, wherein the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
申请公布号 US9418932(B1) 申请公布日期 2016.08.16
申请号 US201514663114 申请日期 2015.03.19
申请人 Altera Corporation 发明人 Lim Queennie Suan Imm;Watt Jeffrey T.;Chen ShuXian
分类号 H01L27/01;H01L23/522;H01L27/06;H01L49/02;H01C10/08;H01C10/23;H01C1/14 主分类号 H01L27/01
代理机构 代理人
主权项 1. A method of manufacture of an integrated circuit system comprising: providing an integrated circuit substrate; and forming a discretized tunable precision resistor having a total resistance including: forming a resistor body over the integrated circuit substrate,forming interconnects directly on the resistor body,forming metal taps directly on the interconnects and at opposing sides of the resistor body, wherein only one of the metal taps is at each of the opposing sides of the resistor body, andforming conductive metal strips over the interconnects, wherein multiple of the conductive metal strips are at each of the opposing sides of the resistor body, the only one of the metal taps is directly under one of the multiple of the conductive metal strips, and the total resistance is a function of an active resistor length of the resistor body between a pair of the metal taps in contact with two of the conductive metal strips.
地址 San Jose CA US