| 摘要 |
PROBLEM TO BE SOLVED: To provide a brush cleaning apparatus which can rotatably support a roll brush so that a deviation does not generate in the axial center of a pair of bearing bodies. SOLUTION: The brush cleaning apparatus can clean a substrate which is transported to a predetermined direction by the roll brush having a brush part at a brush shaft, wherein this apparatus has a first bearing body 27 rotatably supporting a first spindle 31, a second bearing body 27 rotatably supporting a second spindle 31, a fitting joint 38 for disassemblably connecting an end of the brush shaft 36 to the first spindle, a screw joint 39 for disassemblably connecting another end of the brush shaft to the second spindle, a spherical bearing 29 swingably supporting any one of the first bearing body and the second bearing body, and a driving source 48 for rotate driving the roll brush through the spindle supported by any one of the first bearing body and the second bearing body. COPYRIGHT: (C)2007,JPO&INPIT
|
