发明名称 CONNECTION DEVICE AND FLUID SUPPLYING DEVICE HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a connection device and a supplying device that does not require a transferring work from a conveying container and can supply a fluid from the conveying container to a destination device. SOLUTION: Pedestal connection pieces 45a to 47a are fixed to a pedestal 40 that can be attached/detached to/from an opening 42 of the conveying container 22. Tube connection pieces 45b to 47b that can be connected/disconnected to/from each of the pedestal connection pieces 45a to 47a are fixed to tubes 28, 37. This allows the tubes 28, 37 to be connected to the conveying container 22, thereby enabling the system to supply a polishing slurry from the conveying container 22 to a polishing device without a transferring work of the slurry to a storage tank or the like. Thus, the system lessens a replenishing labor of the polishing slurry, can facilitate the replenishing work, and can prevent foreign matter from being mixed into the polishing slurry during the transferring work. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007237318(A) 申请公布日期 2007.09.20
申请号 JP20060061705 申请日期 2006.03.07
申请人 NITTA HAAS INC 发明人 KIDERA SEIJI
分类号 B24B57/02;H01L21/304 主分类号 B24B57/02
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