Gyro sensor, electronic apparatus, and mobile unit

摘要

A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.

主权项

1. A gyro sensor comprising:
a vibrator; a spring part extending from a first fixing part to the vibrator in a direction along a first axis; a drive part that excites the vibrator; and a detection part provided on the vibrator, wherein the vibrator has, in a plan view,
first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other,a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, anda first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part,wherein the connecting spring part extends in the direction along the first axis between the first and second vibrating parts, the connecting spring part includes members extending in the second axis direction and extension members extending in the first axis direction and connecting the members extending in the second axis direction, and the combination of the members extending in the second axis direction and the extension members causes the connecting spring part to traverse back and forth in the second axis direction,wherein the first elastic member extends between the second fixing part and one of the extension members extending in the first axis direction and away from the connecting spring part, andwherein the first elastic member and the second fixing part are disposed within a region between the first vibrating part and the second vibrating part.