Method for creating asymmetrical wafer

摘要

The present invention consists of a method for imparting asymmetry to a truncated annular wafer by either rounding one corner of the orientation flat, or rounding one corner of a notch. This novel method of rounding corners impart a visual and/or tactile asymmetry which can be utilized by a person in order to differentiate between the two different sides of the wafer. This inventive wafer design and method for making an asymmetric wafer is especially useful in the field of semiconductor technology and may be used on sapphire crystal wafers or any other class of wafer.

主权项

1. A method of making a plurality of wafers, comprising the steps of:
determining crystalline orientation of a substantially cylindrical crystal ingot; shaping at least one orientation flat upon said substantially cylindrical-crystal ingot; rounding at least one corner of said orientation flat to create a visual asymmetry to identify the determined crystalline orientation; and slicing said substantially cylindrical crystal ingot into a plurality of wafers, each of the plurality of wafers having at least one rounded corner.