发明名称 Process for producing a multifunctional dielectric layer on a substrate
摘要 A multifunctional dielectric layer can be formed on a substrate, especially on an exposed metallic strip conductor system on a substrate. An additional metal layer is formed across the surface of the exposed metal strip conductors. The metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
申请公布号 US2006222760(A1) 申请公布日期 2006.10.05
申请号 US20060386075 申请日期 2006.03.21
申请人 HELNEDER JOHANN;SCHWERD MARKUS;GOEBEL THOMAS;MITCHELL ANDREA;KOERNER HEINRICH;HOMMEL MARTINA 发明人 HELNEDER JOHANN;SCHWERD MARKUS;GOEBEL THOMAS;MITCHELL ANDREA;KOERNER HEINRICH;HOMMEL MARTINA
分类号 C23C26/00;B29C71/04;C25D9/00;H01L21/768;H01L23/532 主分类号 C23C26/00
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