Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof

摘要

The present invention includes a high-speed, high-saturation power detector (e.g., a photodiode) compatible with a relatively simple monolithic integration process. In particular embodiments, the photodiode includes an intrinsic bulk absorption region, which is grown above a main waveguide core including a number of quantum wells (QWs) that are used as the active region of a phase modulator. The invention also includes methods of fabricating integrated photodiode and waveguide assemblies using a monolithic, simplified process.

主权项

1. A method of fabricating an integrated structure, the method comprising:
providing a base structure comprising a multiple-quantum-well (MQW) region and a photodiode region; patterning a top surface of the base structure with a mask to define an active region and a passive region; introducing impurities, creating vacancies, or heating through the photodiode region and into the MQW region, thereby producing an intermixed MQW region; and depositing one or more cladding layers on the photodiode region.