发明名称 PRINTER FOR ELECTRONIC DEVICE PATTERN AND PRINTING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a printer for an electronic device pattern or a printing method therefor by which print quality of a pattern of an electronic device can be improved by fixing a work plate by use of a porous plate of at least two layers.SOLUTION: A printer for an electronic device pattern has a table on which a holding member for holding a work plate is mounted, and a moving mechanism which relatively moves the table thereby coating an ink onto the work plate. The holding member is equipped with a porous plate of at least two layers. In the printer, the work plate is sucked and fixed via the porous plate of two layers, and in the porous plate of two layers, a bore diameter of one porous plate on a side contacting the work plate is smaller than a bore diameter of other porous plates.SELECTED DRAWING: Figure 1
申请公布号 JP2016087916(A) 申请公布日期 2016.05.23
申请号 JP20140224423 申请日期 2014.11.04
申请人 TOKYO ELECTRON LTD;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY 发明人 SUGIHARA KAZUYOSHI;OGURA SHINTARO;USHIJIMA YOJI
分类号 B41F3/20;B41F3/58;B41F3/82;B41F17/14;B41M1/02;B41M1/34;H05K3/12 主分类号 B41F3/20
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