发明名称 |
Manufacturing method of actuator device and liquid jet apparatus provided with actuator device formed by manufacturing method of the same |
摘要 |
A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a ( 002 ) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.
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申请公布号 |
US2005168524(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20040995945 |
申请日期 |
2004.11.24 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
XIN-SHAN LI;KAZAMA HIRONOBU;MURAI MASAMI;SUMI KOJI;ITO MAKI;YOKOUCHI TOSHIAKI |
分类号 |
H01L41/08;B41J2/01;B41J2/045;B41J2/16;B44C1/22;(IPC1-7):B44C1/22 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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