| 主权项 |
1. A semiconductor device comprising:
a normal pad; and a first monitoring unit suitable for monitoring whether a bunker is formed in the normal pad based on an inherent resistance component of the normal pad during a probe test, wherein the first monitoring unit compares a first voltage applied through a comparative pad including a reference resistance component with a second voltage applied through a center region of the normal pad and generates a detection signal that denotes whether the bunker is formed in the normal pad, wherein the first monitoring unit comprises:
a first comparison unit suitable for comparing the first voltage with the second voltage and outputting a first comparing signal; anda first detection unit suitable for generating the detection signal that denotes whether the bunker is formed in the normal pad, in response to the first comparing signal and a test signal inputted from a test device during the probe test, wherein the first comparison unit comprises:
a sense amplifier suitable for sensing and amplifying a voltage difference between the first voltage and the second voltage. |
