SPUTTERING DEVICE,申请号JP19960023280-传众专利搜索

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发明名称	SPUTTERING DEVICE
摘要
申请公布号	JPH08260140(A)	申请公布日期	1996.10.08
申请号	JP19960023280	申请日期	1996.01.16
申请人	ANELVA CORP	发明人	ARIGA YOSHIKI;KITAHARA HIROAKI
分类号	C23C14/34;H01L21/203;H01L21/285;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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