| 发明名称 |
PROCESS FOR PRODUCING A BLOCK COPOLYMER FILM ON A SUBSTRATE |
| 摘要 |
The invention relates to a process for producing a film of self-assembled block copolymers on a substrate, said process consisting in carrying out a simultaneous deposition of block copolymer and of random copolymer by means of a solution containing a blend of block copolymer and of random copolymer of different chemical nature and which are immiscible, then in carrying out an annealing treatment allowing the promotion of the phase segregation inherent in the self-assembly of block copolymers. |
| 申请公布号 |
US2016319158(A1) |
申请公布日期 |
2016.11.03 |
| 申请号 |
US201415103748 |
申请日期 |
2014.12.10 |
| 申请人 |
ARKEMA FRANCE ;UNIVERSITE DE BORDEAUX ;INSTITUT POLYTECHNIQUE DE BORDEAUX ;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
FLEURY Guillaume;NAVARRO Christophe;HADZIIOANNOU Georges;NICOLET Celia;CHEVALIER Xavier;REBOUL Chrystilla;CASTILLO Veronica;PECASTAINGS Gilles |
| 分类号 |
C09D187/00;B05D3/06;H01L21/027;B01J31/06 |
主分类号 |
C09D187/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A process for producing a film of self-assembled block copolymer on a substrate, wherein the process comprises the following steps:
depositing, on a substrate, a solution containing a blend of a block copolymer and a random or gradient copolymer wherein the block copolymer and the random or gradiant copolymer are of different chemical nature and are immiscible, annealing treatment allowing the promotion of the phase segregation inherent in the self-assembly of block copolymers. |
| 地址 |
Colombes FR |
