| 发明名称 |
A carrier head with a substrate detector |
| 摘要 |
<p>A carrier head has a base (104), a flexible membrane (118), and a valve (200) in the carrier head that forms part of a substrate detecting system. The valve includes a valve stem (202) that contacts an upper surface of the flexible membrane so that if a substrate (10) is attached to the lower surface of the flexible membrane when a chamber (120) above the flexible member is evacuated, the valve is actuated to generate a signal to the substrate detection system. <IMAGE></p> |
| 申请公布号 |
EP1101567(A1) |
申请公布日期 |
2001.05.23 |
| 申请号 |
EP20000310151 |
申请日期 |
2000.11.15 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN, HUNG CHIH;TSENG, MING-KUEI MICHAEL;ZUNIGA, STEVEN |
| 分类号 |
B24B47/22;B24B49/00;B25J15/06;H01L21/304;H01L21/306;(IPC1-7):B24B37/04 |
主分类号 |
B24B47/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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