| 摘要 |
PROBLEM TO BE SOLVED: To assure the quality and reduce the manufacturing cost by simplifying the flow of a continuity inspection process before repair, a repair process, and a continuity inspection process after repair. SOLUTION: This device is composed of inspection apparatuses 17, 24 to inspect whether a defect 23 exists or not by detecting the coordinates X, Y of the existing position of a defective position showing the defect 23 of a plurality of electrode wiring 15-j formed and placed side by side on the substrate 16, the movement position of which is described on a two-dimensional XY coordinate system set on the substrate 16, and which two-dimensionally moves on the two-dimensional XY coordinate system, by electric continuity, repair tools 31, 35 to repair the defect 23 at its repair position, and a reinspection tool 24 to inspect whether the defect is repaired or not by detecting electric continuity of the repair position. The two-dimensional XY coordinate system is set as a co-operate coordinate system with respect to the substrate 16, and control of the movement of the inspection/repair apparatuses is simplified. COPYRIGHT: (C)2005,JPO&NCIPI
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