IMAGE GENERATOR, IMAGE GENERATION METHOD, AND SAMPLE INSPECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To generate a detectable reference image which is used for die-to-database comparison inspection of a multi-layered mask created by using double-layer data and enables the inspection to be performed without decreasing comparison sensitivity. SOLUTION: An image generation method comprises: a Qz/HT/Cr domain extraction process (S116) for inputting first and second multilayered images which form a pattern layer of a halftone film and a pattern layer of a Cr film on a glass substrate and when the input first and second multilayered images are synthesized, extracting an area ratio occupied by each layer for each pixel; a correlated calculation process (S118) for applying correlated calculation to each pixel by using area ratios of two pixels at a point symmetry position with respect to each of the pixels whose area ratio has been extracted; and a convolution process (S120) for calculating a gradation value of each of the pixels by performing convolutional integral of a point spread function for results of the correlated calculation performed to each pixel to generate an image which is obtained by synthesizing the first and second multi-layered images. COPYRIGHT: (C)2007,JPO&INPIT