| 摘要 |
PROBLEM TO BE SOLVED: To supply the air in accordance with a gas quantity and a cleanliness necessary for each constituting member. SOLUTION: A head unit 11 and a lamp unit 12 constitute a duct. The air having large and small dust removed by a pre filter 25 and a middle air filter 26 is sucked by driving a fan 27. The fan 27 blows an air flow C having a large gas quantity to a heat sink 20. A cooling chamber 21 has a pressure higher than an atmospheric pressure, and therefore an air flow E having a small gas quantity is blown out from a vent 28 to a tube 14. An air flow F having minute dust removed by an air filter 13 is supplied by a tube 15 to a lamp chamber 37. The lamp chamber 37 has a pressure higher than the atmospheric pressure, and dust is prevented from entering the lamp chamber 37 from an exhaust port 33a. Since the air in the lamp chamber 37 moves at all times, dust is prevented from adhering to surfaces of ultraviolet lamps 34a and 35a, a transparent guide 32 and the like. |
