Liquid MEMS component responsive to pressure

摘要

A liquid micro-electro-mechanical system (MEMS) component includes a board, a channel frame, a flexible channel side, a liquid droplet, and one or more conductive elements. The channel frame is within the board and mates with the flexible channel side to form a channel within the board. The liquid droplet is contained within the channel. When a pressure is applied to the flexible side, the shape of the liquid droplet is changed with respect to the one or more conductive elements thereby changing an operational characteristic of the liquid MEMS component.

主权项

1. A liquid micro-electro-mechanical system (MEMS) component comprises:
a board; a channel frame within the board; a flexible channel side mating with the channel frame to form a channel within the board; a liquid droplet contained within the channel; two conductive elements contained within the channel, wherein when pressure is applied to the flexible channel side the liquid droplet elongates to make contact with both of the two conductive elements, wherein when pressure is not applied to the flexible channel side the liquid droplet does not make contact with at least one of the two conductive elements, and wherein the liquid MEMS component functions as a switch; and a pressure actuator having:
a second channel within the board;a second liquid droplet within the second channel;a piston movably positioned within the second channel; anda droplet actuation module configured to apply a force on the second liquid droplet that causes the second liquid droplet to apply a transferred force on the piston, which, in turn, causes the piston to apply pressure on the flexible channel side.