发明名称 SEMICONDUCTOR THIN FILM MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor thin film manufacturing method which can form a semiconductor thin film by photonic curing at lower temperature and in a short time.SOLUTION: A semiconductor thin film manufacturing method comprises the steps of: making a precursor ink where a compound as a precursor of a compound semiconductor is dissolved in a solvent and coating the substrate with the precursor ink; and irradiating pulsed light on the precursor ink coated on the substrate. By doing this, a semiconductor thin film having a photoelectric conversion function is formed. The semiconductor thin film can be used for a photoelectric conversion layer and the like of a solar cell.SELECTED DRAWING: None
申请公布号 JP2016178164(A) 申请公布日期 2016.10.06
申请号 JP20150056004 申请日期 2015.03.19
申请人 OSAKA UNIV;SHOWA DENKO KK 发明人 SUGANUMA KATSUAKI;JIU JINTING;SUGAWARA TORU;UCHIDA HIROSHI
分类号 H01L31/18;H01L21/368;H01L31/0749 主分类号 H01L31/18
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