发明名称 |
Disposable Pillars for Contact Information |
摘要 |
Sacrificial plugs for forming contacts in integrated circuits, as well as methods of forming connections in integrated circuit arrays are disclosed. Various pattern transfer and etching steps can be used to create densely-packed features and the connections between features. A sacrificial material can be patterned in a continuous zig-zag line pattern that crosses word lines. Planarization can create parallelogram-shaped blocks of material that can overlie active areas to form sacrificial plugs, which can be replaced with conductive material to form contacts. |
申请公布号 |
US2016254187(A1) |
申请公布日期 |
2016.09.01 |
申请号 |
US201615151150 |
申请日期 |
2016.05.10 |
申请人 |
Micron Technology, Inc. |
发明人 |
Burgess Byron Neville;Zahurak John K. |
分类号 |
H01L21/768;H01L21/321;H01L27/108;H01L27/02;H01L27/088;H01L27/105;H01L23/528 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Boise ID US |