MOLD RELEASE DEVICE, FEED AND DISCHARGE SYSTEM, AND MOLD RELEASING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a mold release device which facilitates releasing a molding from a mold after a fine transfer pattern formed in the mold is transferred to the molding. SOLUTION: The release device 9 is used to release the molds MA and MB from the molding W2 after a fine transfer pattern formed in molds MA and MB is transferred to a molding W2. It has a separating mechanism separating the molds MA and MB from the molding W2 by deforming at least one of the molds MA and MB and the molding W2. COPYRIGHT: (C)2009,JPO&INPIT