发明名称 |
MEMS RESONATOR WITH HIGH QUALITY FACTOR |
摘要 |
A symmetrical MEMS resonator is disclosed with a high quality factor. The MEMS resonator includes a silicon layer with a top surface and bottom surface opposite the top surface. A pair of first metal layers is provided above the top surface of the silicon layer and a corresponding pair of second metal layers is symmetrically provided below the second surface of the silicon layer relative to the pair of first metal layers. Furthermore, a first piezoelectric layer is disposed between the pair of first metal layers and a second piezoelectric layer is disposed between the pair of second metal layers. |
申请公布号 |
WO2016191425(A1) |
申请公布日期 |
2016.12.01 |
申请号 |
WO2016US33929 |
申请日期 |
2016.05.24 |
申请人 |
MURATA MANUFACTURING CO., LTD.;KAAJAKARI, Ville |
发明人 |
KAAJAKARI, Ville |
分类号 |
H03H9/00;H01L41/00;H02N2/00 |
主分类号 |
H03H9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|