| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of improving the adhesiveness of an electrode layer, an inkjet head and methods of manufacturing the piezoelectric actuator and the inkjet head. <P>SOLUTION: On a diaphragm 2, by an aerosol deposition method, there is formed an adhesion layer 3 composed of the same PZT as a material constituting a piezoelectric layer 5. At this time, as particles of the PZT of a ceramic material are comparatively hard and sunk into the diaphragm 2 by a shock of a collision, the adhesion layer 3 strongly is stuck to the diaphragm 2. A lower electrode 4 is formed on this adhesion layer 3, and the piezoelectric layer 5 is lapped thereon. At this time, the lower electrode 4 is provided in a region corresponding to an opening 16A of a pressure room 16, and at the periphery thereof, there is formed an exposed region 3A in which the adhesion layer 3 is exposed. When the piezoelectric layer 5 is laminated on the exposed region 3A, the piezoelectric layer 5 is directly laminated on the adhesion layer 3, and consequently the piezoelectric layer 5 is integrated with the adhesion layer 3. Accordingly, the lower electrode 4 is confined in ceramic layers composed of the adhesion layer 3 and the piezoelectric layer 5 and is firmly fixed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
