| 摘要 |
PROBLEM TO BE SOLVED: To improve maintainability of a chip receiving pan cleaning device. SOLUTION: A cleaning liquid injection pipe 51 is detachably installed along an upper edge part of a chip receiving pan 12. The chip receiving pan 12 is formed in a square shape in a plan view. The cleaning liquid injection pipe 51 has four straight line-shaped pipe bodies 61 to 64 respectively extended to the four sides of the upper edge part of the chip receiving pan 12. At least two pipe holes 41 to 44 turned in the two-side direction of the upper edge part of the chip receiving pan 2 thereby and capable of movably inserting the pipe bodies 61 to 64 in the axial direction, are bored in the respective corners of the chip receiving pan 12. Both end parts of the corresponding pipe bodies 61 to 64 can be held by at least the two opposed pipe holes 41 to 44 of the adjacent two corners of the chip receiving pan 12. COPYRIGHT: (C)2008,JPO&INPIT
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