| 发明名称 |
Rod replenishment system for use in single crystal silicon production |
| 摘要 |
A system is disclosed for efficient utilization of charge replenishment rods in Czochralski silicon crystal growing processes.
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| 申请公布号 |
US2002108557(A1) |
申请公布日期 |
2002.08.15 |
| 申请号 |
US20010040240 |
申请日期 |
2001.10.26 |
| 申请人 |
WOOD HENRY D.;HILL JOHN PETER;NELSON JAY CURTIS;JUHASZ WILLIAM JOHN;DAWSON HOWARD J. |
发明人 |
WOOD HENRY D.;HILL JOHN PETER;NELSON JAY CURTIS;JUHASZ WILLIAM JOHN;DAWSON HOWARD J. |
| 分类号 |
C30B15/02;(IPC1-7):C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B1/00;C30B30/04 |
主分类号 |
C30B15/02 |
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