THIN FILM-TYPE SUPER CAPACITOR AND PREPARATION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a thin film super capacitor that can be applied to ultra- compact precision parts and the power source of information communication equipment by composing a thin film battery in a hybrid and individually, the manufacturing method of the thin film super capacitor, and a hybrid battery utilizing the thin film super capacitor. SOLUTION: A lower electrode thin film (23) with a thickness of 4 μm or less is formed on a substrate (20), a solid electrolyte thin film (24) with a thickness of 5 μm or less is formed on the lower electrode thin film (23), and an upper electrode thin film (25) with a thickness of 4 μm or less is formed on the solid electrolyte thin film (24), thus composing the thin film super capacitor. By utilizing the thin film super capacitor, the hybrid battery is composed.