发明名称 STRIPPING AGENT COMPOSITION AND METHOD OF STRIPPING
摘要 A stripping agent composition comprising (a) an anticorrosive, (b) a stripping agent, and (c) a solvent, characterized in that the anticorrosive (a) is a heterocyclic compound having a six-membered ring containing a nitrogen atom.
申请公布号 WO0201300(A1) 申请公布日期 2002.01.03
申请号 WO2001JP05505 申请日期 2001.06.27
申请人 NEC CORPORATION;KOITO, TATSUYA;HIRANO, KEIJI;AOKI, HIDEMITSU;TOMIMORI, HIROAKI 发明人 KOITO, TATSUYA;HIRANO, KEIJI;AOKI, HIDEMITSU;TOMIMORI, HIROAKI
分类号 C11D7/32;C11D11/00;G03F7/42;H01L21/02;H01L21/306;H01L21/311;H01L21/768;(IPC1-7):G03F7/42;H01L21/304;C23F11/00 主分类号 C11D7/32
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