发明名称 ATOM PROBE PULSE ENERGY
摘要 The present invention relates to atom probe pulse energy. One aspect of the invention is directed toward a method that includes establishing a data relationship between pulse energy and bias energy for a target evaporation rate. In selected embodiments, establishing a data relationship can include determining an equivalent pulse fraction for a selected pulse energy and bias energy combination based on a local change in bias energy compared to a local change in pulse energy associated with the selected pulse energy and bias energy combination. Another aspect of the invention is directed toward a method that includes determining an equivalent pulse fraction for a first bias energy and pulse energy combination and/or a second bias energy and pulse energy combination based on the difference between the first bias energy and the second bias energy compared to the difference between the first pulse energy and the second pulse energy.
申请公布号 WO2007053721(A3) 申请公布日期 2009.04.23
申请号 WO2006US42742 申请日期 2006.10.31
申请人 IMAGO SCIENTIFIC INSTRUMENTS CORPORATION;BUNTON, JOSEPH, HALE 发明人 BUNTON, JOSEPH, HALE
分类号 H01J21/00;H01J21/24 主分类号 H01J21/00
代理机构 代理人
主权项
地址