发明名称 Chemical sensors based on plasmon resonance in graphene
摘要 Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
申请公布号 US9423345(B2) 申请公布日期 2016.08.23
申请号 US201414313456 申请日期 2014.06.24
申请人 International Business Machines Corporation 发明人 Avouris Phaedon;Farmer Damon B.;Li Yilei;Yan Hugen
分类号 G01N21/75;G01N21/552;H01L21/04;H01L21/31 主分类号 G01N21/75
代理机构 Michael J. Chang, LLC 代理人 Alexanian Vazken;Michael J. Chang, LLC
主权项 1. A method of forming a graphene-based surface plasmon resonance (SPR) sensor, comprising the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on an electrically conductive layer, and wherein the graphene is deposited onto the dielectric layer; doping the graphene with an n-type or p-type dopant; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween.
地址 Armonk NY US