| 摘要 |
The present invention relates to a measurement device for inspecting a bonding zone (18) between samples (16, 17), comprising (i) a low-coherence interferometer illuminated by a polychromatic light source having a measurement arm crossing said connection zone (18) and a reference arm, (ii) at least one optical detector (10) and optical and/or mechanical conditioning means (15) arranged to enable the acquisition of at least two interference measurements having different phase conditions between an measurement optical beam (21) coming from the measurement arm and a reference optical beam (20) coming from the reference arm; and (iii) calculation means (25) provided to calculate contrast information relating to said interference and to search, on the basis of said contrast information, for defects (19) in said bonding zone (18). |
