| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for a scanning probe microscope capable of simultaneously measuring the surface shape of a sample and a plurality of physical properties in a microregion. SOLUTION: The probe for the scanning probe microscope includes a cantilever 22, which composed of sharpened first and second probe parts 21 and 211, a cantilever 22a having the first probe part 21 provided to its leading end in a protrusion and a cantilever 22b having the second probe part 211 provided to its leading end in a protrusion and a body 23 for fixing the base end of the cantilever 22 in a cantilevered state so that the leading end of the cantilever 22 becomes a free end. COPYRIGHT: (C)2008,JPO&INPIT
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