DEVICE FOR REMOVING OXYGEN CONTAINED IN GAS AND APPARATUS FOR PRODUCING HIGH PURITY NITROGEN GAS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for producing high purity nitrogen gas, with which high purity nitrogen gas can be produced. SOLUTION: The apparatus for producing high purity nitrogen gas includes: a compressor 12 for compressing the atmosphere 11; a filter 13 for removing dust in the atmosphere 11; a hollow fiber membrane 14 wherein hollow fibers for separating the compressed air into a nitrogen component and an oxygen component are bundled; and a deoxidation device 18 for removing a trace amount of oxygen contained in the nitrogen component separated by the hollow fiber membrane 14 to produce high purity nitrogen gas. As a deoxidation agent filled in the deoxidation device 18, a cerium oxide-based deoxidation agent having oxygen defects is used. COPYRIGHT: (C)2009,JPO&INPIT