| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum device that can open a part of a chamber in vacuum state well to the atmosphere by a simple structure, and to provide a mass spectroscope including the same.SOLUTION: An opening 103 is opened and closed by means of a gate valve 300. The gate valve 300 has a displacement part 301 and a closing part 303. The displacement part 301 can displace for the body 100. When the displacement part 301 is displaced, the closing part 303 is energized by reaction from the body 100 in a direction crossing the displacement direction D of the displacement part 301, and closes the opening 103. When a first chamber 101 and a second chamber 102 are in vacuum state, the opening 103 is closed by the closing part 303 as the displacement part 301 is displaced, and then the first chamber 101 is opened to the atmospheric pressure by means of an opening and closing section 212, the closing part 303 is compressed to the opening 103 side by the atmospheric pressure.SELECTED DRAWING: Figure 5 |
