发明名称 SPECTRAL GRADIENT FILTER PRODUCTION USING SURFACE APPLIED ARRAY OPTIMIZED 3D SHADOW MASKS
摘要 A method of producing spectral gradient filters using surface applied array optimized 3D shadow masks by placing the shadow mask on the surface of the wafer substrate using a technique such as 3D printing, and by also using spatial algorithms to shape each mask aperture individually is disclosed.
申请公布号 WO2016171978(A1) 申请公布日期 2016.10.27
申请号 WO2016US27408 申请日期 2016.04.14
申请人 PIXELTEQ, INC. 发明人 LANE, James D.
分类号 G03F1/20;G03F1/36;G03F1/70;G03F1/76;G03F1/92;G03F7/20;H01L21/027 主分类号 G03F1/20
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