发明名称 Verfahren zur Handhabung eines dünnen Halbleiterwafers oder Substrats
摘要 <p>Production of a thin semiconductor wafer (4) comprises applying a first carrier material (3) to a first surface of the wafer using a first connecting medium (2); processing a second surface of the wafer; applying a second carrier material (6) to the second surface of the wafer using a second connecting medium; detaching the first adhering connection and removing the first carrier material from the first surface of the wafer; processing the first surface of the wafer; and detaching the second adhering connection and removing the second carrier material from the second surface of the wafer. Preferred Features: The first adhering connection and the second adhering connection are separately removed. The carrier materials are made from glass, SiO2 or sapphire, or semiconductor material.</p>
申请公布号 DE10065686(C2) 申请公布日期 2002.11.14
申请号 DE2000165686 申请日期 2000.12.29
申请人 INFINEON TECHNOLOGIES AG 发明人 SCHMIDT, THOMAS
分类号 H01L21/331;H01L21/68;H01L21/762;(IPC1-7):H01L21/58 主分类号 H01L21/331
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