END EFFECTORS AND RETICLE HANDLING AT A HIGH THROUGHPUT

摘要

End effectors of reticle mechanical interface pods as well as reticle handling methods are provided, which handle the reticle by the end effector by applying a lateral force and/or a downward force on the reticle during the handling to fixate the reticle to at least two supports (e.g., at least four fingers) which are attached to at least two arms of the end effector and are configured to apply an upwards force on the reticle. Hence the reticle is fixated to the end effector and can be handled with higher accelerations and at a higher throughput than current methods. End effectors may have multiple fingers to fixate the reticle, and on more pushers may apply a downwards force to further fixate the reticle to the supports.

主权项

1. A method for handling a reticle, comprising the steps of:
applying at least a lateral force or a downward force on the reticle with an end effector to fixate the reticle to at least two supports which are attached to at least two arms of the end effector and are configured to apply an upwards force on the reticle.