CLOSE-COUPLED PURGEABLE VAPORIZER VALVE

摘要

A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.