<p>The invention provides a method and a measurement system. The system includes: (i) a scanner for scanning an area that comprises multiple structural elements with a beam of charged particles; (ii) a detector (16), positioned to receive charged particles resulting from an interaction between the area and the beam of charged particles and to provide multiple detection signals; and (iii) a processor (102), adapted to process detection signals associated with multiple ideally identical structural elements to provide a result representative of at least one feature of at least one of said ideally identical structural elements.</p>
