发明名称 Verfahren zur Herstellung von in ein Gehäuse hermetisch dicht einlötbaren Fensterelementen und danach hergestellte Freiformfensterelemente
摘要 A method for production of window elements which can be soldered into a housing in a hermetically tight manner with optical coating and free-form window elements are disclosed. After application of optical coatings, a protective layer is applied to the optical coating, the two layer systems are selectively removed by means of a machining beam of high-energy radiation for the purpose of ablation of a desired optically active free-form surface for window elements with any geometric shape through a localized machining beam in edge regions of the optically active free-form surface such that the protective layer remains on the optical coating as lift-off mask which is lifted off after applying a metallization for a solder layer by an etching process that acts selectively only on the protective layer but not on the optical coating, and the metallization remains only on the peripheral edge regions circumscribing the free-form surfaces.
申请公布号 DE112014002384(A5) 申请公布日期 2016.07.14
申请号 DE20141102384T 申请日期 2014.05.13
申请人 JENOPTIK Optical Systems GmbH;Micro-Hybrid Electronic GmbH 发明人 Biermann, Steffen;Gittler, Elvira;Brode, Wolfgang;Störzner, Falko
分类号 G02B7/00;G01J5/08;G02B1/02;H01L31/0203;H01L33/48 主分类号 G02B7/00
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