ION BEAM EXTRACTION ELECTRODE AND ION SOURCE

摘要

To improve maintainability of an ion beam extraction electrode. An ion beam extraction electrode (E) is equipped with: an electrode unit (1) that is provided with openings which ion beams pass through; and a supporting frame (11) that fixes and supports the electrode unit (1). A cooling medium flow channel (12) is formed in the supporting frame (11), and the supporting frame is provided with a shift regulation unit (13) that limits, at the time when the electrode unit (1) is disposed on the supporting frame (11), a shift of the electrode unit (1) within a plane substantially perpendicular to the direction in which the ion beams pass through.