| 摘要 |
PROBLEM TO BE SOLVED: To provide a tunnel type washing apparatus capable of conducting a finishing precision washing process in a line without lowering the cleanliness in a clean room. SOLUTION: The tunnel type washing apparatus includes: a hollow passage 26; a conveyance device 8 penetrating this hollow passage for conveying a washing object through the hollow passage; washing devices 3, 4 disposed on the inlet side of the hollow passage and for washing and removing deposits deposited to the washing object conveyed by the conveyance device; a drainage device 5 provided on the downstream side in the conveyance direction of the washing object of the washing devices and for draining the washed washing object; a drying device 6 provided on the downstream side in the conveyance direction of the cleaning object of the drainage device and for heating and drying the drained washing object; and a cooling device 7 provided on the downstream side in the conveyance direction of the washing object of the drying device and for cooling the dried washing object. COPYRIGHT: (C)2008,JPO&INPIT
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